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Temperature Measurement Performance of Silicon Piezoresistive MEMS Pressure Sensors for Industrial Applications
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Temperature Measurement Performance of Silicon Piezoresistive MEMS Pressure Sensors for Industrial Applications
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A MEMS Resonant Sensor to Measure Fluid Density and Viscosity under Flexural and Torsional Vibrating Modes
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A MEMS Resonant Sensor to Measure Fluid Density and Viscosity under Flexural and Torsional Vibrating Modes
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Micro sensor-actuador třmico sin batera̕s para aplicaciones en microelectrn̤ica de ultra-bajo consumo de potencia
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Micro sensor-actuador třmico sin batera̕s para aplicaciones en microelectrn̤ica de ultra-bajo consumo de potencia
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Towards an Ultra-Sensitive Temperature Sensor for Uncooled Infrared Sensing in CMOS<U+0096>MEMS Technology
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Towards an Ultra-Sensitive Temperature Sensor for Uncooled Infrared Sensing in CMOS<U+0096>MEMS Technology
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