Towards an Ultra-Sensitive Temperature Sensor for Uncooled Infrared Sensing in CMOS<U+0096>MEMS Technology

En esta investigacin̤ se ofrece una solucin̤ confiable para resolver el problema de no linealidad de un resonador CMOS-MEMS (semiconductor complementario de x̤ido metl̀ico-sistema microelectromecǹico) y, adems̀, se demuestra un potencial notable para construir un sensor de temperatura CMOS-MEMS par...

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Manylion Llyfryddiaeth

Awduron Eraill:	Gk̲taş Hasan, MDPI
Fformat:	Llyfr
Iaith:	English
Pynciau:	Tecnologa̕ de la instrumentacin̤ Instrumentos de medicin̤ Instrumentation technology Measuring instruments Instrumentacin̤ industrial Sensores Sensores de temperatura Detector třmico Sensor infrarrojo Microbolm̤etro Microresonadores Semiconductor complementario de x̤ido metl̀ico CMOS Sistema microelectromecǹico MEMS Industrial instrumentation Sensors Temperature sensors Thermal detector Infrared sensor Microbolometer Microresonators Complementary metal oxide semiconductor Microelectromechanical system MEMS
Mynediad Ar-lein:	Towards an Ultra-Sensitive Temperature Sensor for Uncooled Infrared Sensing in CMOS<U+0096>MEMS Technology
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