Towards an Ultra-Sensitive Temperature Sensor for Uncooled Infrared Sensing in CMOS<U+0096>MEMS Technology

En esta investigacin̤ se ofrece una solucin̤ confiable para resolver el problema de no linealidad de un resonador CMOS-MEMS (semiconductor complementario de x̤ido metl̀ico-sistema microelectromecǹico) y, adems̀, se demuestra un potencial notable para construir un sensor de temperatura CMOS-MEMS par...

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Bibliographische Detailangaben

Weitere Verfasser:	Gk̲taş Hasan, MDPI
Format:	Buch
Sprache:	English
Schlagworte:	Tecnologa̕ de la instrumentacin̤ Instrumentos de medicin̤ Instrumentation technology Measuring instruments Instrumentacin̤ industrial Sensores Sensores de temperatura Detector třmico Sensor infrarrojo Microbolm̤etro Microresonadores Semiconductor complementario de x̤ido metl̀ico CMOS Sistema microelectromecǹico MEMS Industrial instrumentation Sensors Temperature sensors Thermal detector Infrared sensor Microbolometer Microresonators Complementary metal oxide semiconductor Microelectromechanical system MEMS
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