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Semiconductor manufacturing handbook

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Detalles Bibliográficos
Autor Corporativo:	IDC Corporation.
Otros Autores:	Geng, Hwaiyu., Zhou, Lin., Park, Ilsun., Ravi, K. V., Rathore, Hazara S., Chanda, Kaushik., Ren, L. P., Tu, King N., Coumou, David J., Biltoft, Peter., Howard, Charles., Mack, Chris A., Graf, Michael., Zhang, Peng., Lai, Shouliang., Solzbacher, Florian., McInerney, Edward J., Ramdani, Jamal., Vaccari, Giovanni., Ritzdorf, Tom., Klocke, John., Dyer, Timothy S., Machamer, Andrew., Blair, Donald W., Arai, Kazuhisa., Kobayashi, Yoshikazu., Otani, Hideaki., Tonnies, Dietrich., Topper, Michael., Wang, Zhong L., Huff, Michael A., Liu, David N., Curcie, Wayne D., Sweeney, Joseph D., Cox, James C., Cavicchi, Kristin., Barsness, Dan., Gould, Charles K., Albrecht, David J., Li, Bo., Carriker, Wayne., Haris, Clint., Peltinov, Ram., Menaker, Mina., Scibilia, Bruno., Altis, Yoan Dupret., McCafferty, Robert H., Davis, Brett J., Trammell, Steven R., Pavlotsky, Richard V., Beck, Stephen C., Gendreau, Michael., Amick, Hal., Levit, Larry., Muller, Chris., Kochevar, Steven., Gromala, Jerry., Pinkowski, Richard E.
Formato:	Electrónico eBook
Lenguaje:	English
Publicado:	New York : McGraw-Hill, [2005]
Series:	McGraw-Hill's AccessEngineering.
Materias:	Semiconductors > Design and construction. Integrated circuits > Design and construction. Semiconductors > Materials. Integrated circuits > Reliability. Dielectrics. Silicides. Plasma engineering. Process control. Vacuum techology. Integrated circuits > Masks. Microlithography. Ion implantation. Rapid thermal process. Plasma etching. Etching. Physical vapor deposition. Chemical vapor deposition. Epitaxy. Electrolytic polishing. Semiconductors > Polishing. Semiconductors > Cleaning. Grinding and polishing. Microelectronic packaging. Electronic packaging. Nanotechnology. Microfabrication. Microelectromechanical systems. Flat panel displays. Gases. Waste gases > Purification. Hydraulic conveying. Slurry pipelines. Chemical plants > Waste disposal. Water-supply engineering. Materials handling. Metrology. Six sigma (Quality control standard) Semiconductor industry > Environmental aspects. Semiconductor industry > Health aspects. Semiconductor industry > Safety measures. Clean rooms > Design and construction. Vibration. Noise control. Static eliminators. Electrostatics. Airborne infection. Air > Pollution. Sewage > Purification > Neutralization. Electronic books. Internet resources.
Acceso en línea:	https://www.accessengineeringlibrary.com/content/book/9780071445597
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