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Semiconductor manufacturing handbook

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Bibliographic Details
Corporate Author: IDC Corporation.
Other Authors: Geng, Hwaiyu., Zhou, Lin., Park, Ilsun., Ravi, K. V., Rathore, Hazara S., Chanda, Kaushik., Ren, L. P., Tu, King N., Coumou, David J., Biltoft, Peter., Howard, Charles., Mack, Chris A., Graf, Michael., Zhang, Peng., Lai, Shouliang., Solzbacher, Florian., McInerney, Edward J., Ramdani, Jamal., Vaccari, Giovanni., Ritzdorf, Tom., Klocke, John., Dyer, Timothy S., Machamer, Andrew., Blair, Donald W., Arai, Kazuhisa., Kobayashi, Yoshikazu., Otani, Hideaki., Tonnies, Dietrich., Topper, Michael., Wang, Zhong L., Huff, Michael A., Liu, David N., Curcie, Wayne D., Sweeney, Joseph D., Cox, James C., Cavicchi, Kristin., Barsness, Dan., Gould, Charles K., Albrecht, David J., Li, Bo., Carriker, Wayne., Haris, Clint., Peltinov, Ram., Menaker, Mina., Scibilia, Bruno., Altis, Yoan Dupret., McCafferty, Robert H., Davis, Brett J., Trammell, Steven R., Pavlotsky, Richard V., Beck, Stephen C., Gendreau, Michael., Amick, Hal., Levit, Larry., Muller, Chris., Kochevar, Steven., Gromala, Jerry., Pinkowski, Richard E.
Format: Electronic eBook
Language:English
Published: New York : McGraw-Hill, [2005]
Series:McGraw-Hill's AccessEngineering.
Subjects:
Semiconductors > Design and construction.
Integrated circuits > Design and construction.
Semiconductors > Materials.
Integrated circuits > Reliability.
Dielectrics.
Silicides.
Plasma engineering.
Process control.
Vacuum techology.
Integrated circuits > Masks.
Microlithography.
Ion implantation.
Rapid thermal process.
Plasma etching.
Etching.
Physical vapor deposition.
Chemical vapor deposition.
Epitaxy.
Electrolytic polishing.
Semiconductors > Polishing.
Semiconductors > Cleaning.
Grinding and polishing.
Microelectronic packaging.
Electronic packaging.
Nanotechnology.
Microfabrication.
Microelectromechanical systems.
Flat panel displays.
Gases.
Waste gases > Purification.
Hydraulic conveying.
Slurry pipelines.
Chemical plants > Waste disposal.
Water-supply engineering.
Materials handling.
Metrology.
Six sigma (Quality control standard)
Semiconductor industry > Environmental aspects.
Semiconductor industry > Health aspects.
Semiconductor industry > Safety measures.
Clean rooms > Design and construction.
Vibration.
Noise control.
Static eliminators.
Electrostatics.
Airborne infection.
Air > Pollution.
Sewage > Purification > Neutralization.
Electronic books.
Internet resources.
Online Access:https://www.accessengineeringlibrary.com/content/book/9780071445597
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