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1
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Published 2009
Subjects: “...Extreme ultraviolet lithography....”
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2
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Published 2010
“...Optofluidic maskless lithography and guided self-assembly....”
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3
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Published 2000
“...High-resolution lithography for optoelectronics....”
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4
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Published 2010
Table of Contents: “... ultraviolet lithography -- Ray tracing of x-ray optical systems -- X-ray properties of materials -- Refractive...”
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